Organic-inorganic materials for integrated optoelectronics
- 1 October 1998
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 34 (20) , 1940-1941
- https://doi.org/10.1049/el:19981360
Abstract
A new composition of organic-inorganic photosensitive materials is grown using the sol-gel process. The material, organoaluminosilicate, is spin coated onto Si wafers and channel waveguides are photoinscribed and developed using solvent assisted photolithographic process. The process is simple, reproducible, low cost and low loss.Keywords
This publication has 2 references indexed in Scilit:
- Sol-gel integrated optical coupler byultraviolet light imprintingElectronics Letters, 1995
- Integrated Optics: Theory and TechnologyPublished by Springer Nature ,1991