A history of commercial implantation
- 1 January 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 6 (1-2) , 1-8
- https://doi.org/10.1016/0168-583x(85)90602-0
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Historical perspective and future trends for ion implantation systemsNuclear Instruments and Methods in Physics Research, 1981
- Tandem Van De Graaff AcceleratorsScientific American, 1970