An integrated gas sensor on silicon substrate with sensitive SnOx layer
- 31 August 1990
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 2 (3) , 233-236
- https://doi.org/10.1016/0925-4005(90)85010-v
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Surface processes in the detection of reducing gases with SnO2-based devicesSensors and Actuators, 1989
- The tin oxide gas sensor and its applicationsSensors and Actuators, 1984
- Semiconductor gas sensorsSensors and Actuators, 1981