In‐Situ mechanistic studies of the reaction of trimethylgallium and phosphine in zeolite H‐Y

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Abstract
Coherent anti‐Stokes Raman scattering (CARS) has been utilised to monitor the decomposition of trimethylgallium (TMGa) on the reactive internal surface of the protonated form of zeolite Y under metal organic chemical vapour deposition (MOCVD) conditions designed to produce GaP deposits that exhibit quantum‐size effects. The CARS data clearly reveal the facile room temperature decomposition of TMGa in the zeolite, as evidenced by the detection of increasing levels of methane with increasing reaction time. In addition, the zeolite samples were analysed by solid state nuclear magnetic resonance with magic angle spinning (MAS NMR) before reaction, after reaction of TMGa and after subsequent reaction with phosphine at 300°C. These data reveal that TMGa reacts with acid sites in the zeolite 12‐rings, resulting in species containing methyl groups. Subsequent exposure to phosphine removes these methyl group protons, leaving various, as yet not fully characterised, phosphorus species. Exposure to phosphine does not appear to regenerate the acid sites on the zeolite.