Technological development of soft x-ray mirror in the Advanced Material Processing and Machining Technology Research Association (AMMTRA)
- 1 April 1992
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 51 (1-3) , 273-282
- https://doi.org/10.1016/0257-8972(92)90251-5
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Analysis Of The Smoothing Process Observed During The Soft X-Ray Multilayer DepositionPublished by SPIE-Intl Soc Optical Eng ,1988
- Plasma filament ion sourceVacuum, 1986