Alignment of mask patterns to crystal orientation
- 31 May 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 53 (1-3) , 345-348
- https://doi.org/10.1016/0924-4247(96)80158-0
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Highly efficient optical phase modulator in SOIwaveguidesElectronics Letters, 1995
- Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation LayersJournal of the Electrochemical Society, 1990