Fabrication of three-dimensional silicon structures by means of doping-selective etching (DSE)
- 2 January 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 16 (1-2) , 67-82
- https://doi.org/10.1016/0250-6874(89)80006-x
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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