Effect of vacuum ambience on Al–Si contacts

• 1 January 1977
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 14  (1) , 79-84
• https://doi.org/10.1116/1.569178

Abstract

Keywords

• SI CONTACTS
• VACUUM AMBIENCE
• EFFECT OF VACUUM
• AMBIENCE ON AL