Oxygen diffusion into diamond induced by hydrogen microwave plasma
- 6 January 1992
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 60 (1) , 47-49
- https://doi.org/10.1063/1.107368
Abstract
Diffusion of oxygen atoms into diamond can be introduced by CrO3 treatment followed by an exposure to a hydrogen plasma. From characterization using Rutherford backscattering spectrometry, it is found that the depth distribution of the doped oxygen in the diamond is homogeneous from the surface where its concentration is about 1020 atoms/cm3. The doped oxygen can form cathodoluminescence centers yielding luminescence peaks at 3.75 and 4.64 eV at room temperature. After the diffusion of oxygen atoms, damages in the diamond cannot be detected by Raman scattering spectroscopy.Keywords
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