Beam qualities of a microwave ion source
- 1 January 1990
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 61 (1) , 309-311
- https://doi.org/10.1063/1.1141331
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Emittances of a microwave ion source for implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Computers and the design of ion beam optical systemsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987