Lateral Epitaxial Growth of Thick Polysilicon Films on Oxidized 3-Inch Wafers
- 1 January 1982
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Defect Etch for Silicon EvaluationJournal of the Electrochemical Society, 1979
- Selective Growth of Epitaxial Silicon and Gallium ArsenideJournal of the Electrochemical Society, 1971