A test structure for the design of thermal flow sensors

This publication has 7 references indexed in Scilit:

• Scaling of thermal CMOS gas flow microsensors: experiment and simulation
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
• Thermal flow sensor for liquids and gases based on combinations of two principles
  Sensors and Actuators A: Physical, 1999
• Specific Problems of FEM Thermal Simulations for Microsystems
  Computers in Railways XIV, 1995
• Intelligent gas-mixture flow sensor
  Sensors and Actuators A: Physical, 1995
• A high sensitivity CMOS gas flow sensor on a thin dielectric membrane
  Sensors and Actuators A: Physical, 1993
• Fabrication and modelling of CMOS microbridge gas-flow sensors
  Sensors and Actuators B: Chemical, 1992
• Heat transport from a chip
  IEEE Transactions on Electron Devices, 1990