Abstract: Composition changes in GaAs due to low-energy ion bombardment

• 1 March 1978
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 15  (2) , 725
• https://doi.org/10.1116/1.569498

Abstract

Keywords

• GAAS DUE
• ENERGY ION BOMBARDMENT
• DUE TO LOW
• CHANGES IN GAAS