Polishing silicon surfaces strain-free and flat to better than λ/20
- 15 September 1986
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 25 (18) , 3006
- https://doi.org/10.1364/ao.25.003006
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 2 references indexed in Scilit:
- Teflon polishers: their manufacture and useApplied Optics, 1976
- Bragg reflection x ray opticsReports on Progress in Physics, 1971