Investigations of porous silicon for vapor sensing
- 30 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3) , 835-839
- https://doi.org/10.1016/0924-4247(90)87042-h
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Humidity sensors: Principles and applicationsSensors and Actuators, 1986
- An experimental and theoretical study of the formation and microstructure of porous siliconJournal of Crystal Growth, 1985
- Pore Size Distribution in Porous Silicon Studied by Adsorption IsothermsJournal of the Electrochemical Society, 1983