In situ x-ray reflectivity measurements of thin film structural evolution

• 1 July 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 12  (4) , 1565-1568
• https://doi.org/10.1116/1.579356

Abstract

Keywords

• REAL TIME
• X RAY REFLECTIVITY
• IONIZING RADIATION
• ELECTROMAGNETIC RADIATION
• PHYSICAL VAPOR DEPOSITION
• ROOM TEMPERATURE
• MICROSTRUCTURES
• PHYSICAL PROPERTIES
• HEAT TREATMENT
• THIN FILM
• CHROMIUM
• SPECTRAL REFLECTANCE
• SURFACE ROUGHNESS