High-Coercive-Force Rare-Earth Alloy Films by Getter Sputtering
- 1 June 1969
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 40 (7) , 2994-2996
- https://doi.org/10.1063/1.1658112
Abstract
Thin films of the rare‐earth alloys of the Co–Sm system with and without the addition of Cu have been found to have exceptionally high coercive forces. A coercive force of 30 000 Oe was realized with Co3.65Cu1.35Sm films, 4000‐Å thick prepared at a substrate temperature of 500°C using getter sputtering. This technique avoids troublesome oxidation problems usually encountered in preparing films of active materials such as the rare‐earth compounds.This publication has 2 references indexed in Scilit:
- NEW PERMANENT MAGNET MATERIALSApplied Physics Letters, 1968
- Getter Sputtering for the Preparation of Thin Films of Superconducting Elements and CompoundsJournal of Applied Physics, 1964