On SiC contamination of silicon epitaxial wafer
- 1 October 1964
- journal article
- Published by Elsevier in Solid-State Electronics
- Vol. 7 (10) , 743-753
- https://doi.org/10.1016/0038-1101(64)90032-2
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- Thickness Measurement of Epitaxial Films by the Infrared Interference MethodJournal of the Electrochemical Society, 1962
- Single Crystal Silicon OvergrowthsJournal of the Electrochemical Society, 1961
- Vapor-Deposited Single-Crystal GermaniumJournal of Applied Physics, 1960
- Infrared Lattice Absorption in Ionic and Homopolar CrystalsPhysical Review B, 1955