Preparation of W-C thin films by reactive R.F. sputtering and Auger electron spectroscopy surface characterization
- 1 July 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 161, L91-L95
- https://doi.org/10.1016/0040-6090(88)90275-1
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
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