Measurement of the Thickness and Optical Properties of Thermal Oxides of Si Using Spectroscopic Ellipsometry and Stylus Profilometry
- 1 June 1991
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 138 (6) , 1770-1778
- https://doi.org/10.1149/1.2085871
Abstract
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