Growth of ZnO thin film on SiO2 substrates by the RF magnetron sputtering method

• 1 January 2003
• journal article
• Published by Springer Nature in Journal of Materials Science Letters
• Vol. 22  (16) , 1155-1156
• https://doi.org/10.1023/a:1025131212403

Abstract

Keywords

• ZNO
• MAGNETRON SPUTTERING
• RF MAGNETRON
• SPUTTERING METHOD
• SIO2 SUBSTRATES