A New LPCVD Technique of Producing Borophosphosilicate Glass Films by Injection of Miscible Liquid Precursors
- 1 February 1987
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 134 (2) , 430-437
- https://doi.org/10.1149/1.2100473
Abstract
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