Diamond-like carbon films prepared from CH4-H2-H2O mixed gas using a microwave plasma
- 1 January 1989
- journal article
- Published by Springer Nature in Journal of Materials Science
- Vol. 24 (1) , 293-297
- https://doi.org/10.1007/bf00660970
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Amorphous hard carbon films on polycarbonate substratesVacuum, 1984
- Hard carbon coatings with low optical absorptionApplied Physics Letters, 1983
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- Decomposition of hydrocarbons in a microwave discharge. I. Methane. Effect of powerThe Journal of Physical Chemistry, 1969