Characterizing Polyimide Films for Semiconductor Application

• 7 April 1982
• book chapter
• Published by American Chemical Society (ACS)
• p. 139-150
• https://doi.org/10.1021/bk-1982-0184.ch011

Abstract

Keywords

• PLASTIC
• POLYIMIDE RESINS
• FILMS
• LSI
• COWORKERS
• INSULATOR
• SEMICONDUCTOR
• CIRCUIT