Two-dimensional images of CF/sub 2/ density in CF/sub 4//Ar plasmas by laser-induced fluorescence in a GEC RF reference cell
- 1 January 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 24 (1) , 113-114
- https://doi.org/10.1109/27.491738
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Two-dimensional laser-induced fluorescence imaging of metastable density in low-pressure radio frequency argon plasmas with added O2, Cl2, and CF4Journal of Applied Physics, 1996
- In situ diode laser absorption measurements of plasma species in a gaseous electronics conference reference cell reactorJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1995
- The importance of free radical recombination reactions in CF4/O2 plasma etching of siliconJournal of Vacuum Science & Technology A, 1990