Subwavelength Antireflection Gratings for Light Emitting Diodes and Photodiodes Fabricated by Fast Atom Beam Etching
- 30 June 2002
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 41 (Part 1, No) , 4346-4349
- https://doi.org/10.1143/jjap.41.4346
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