Nickel and copper electroplating of proton beam micromachined SU-8 resist

• 1 September 2002
• journal article
• Published by Springer Nature in Microsystem Technologies
• Vol. 8  (6) , 383-386
• https://doi.org/10.1007/s00542-001-0139-5

Abstract

Keywords

• HIGH ASPECT RATIO
• THREE DIMENSIONAL
• MICROSTRUCTURES
• NICKEL
• COPPER