Defect evolution in ion implanted crystalline Si probed by in situ conductivity measurements
- 1 March 1995
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 96 (1-2) , 219-222
- https://doi.org/10.1016/0168-583x(94)00486-2
Abstract
No abstract availableKeywords
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