Radiolysis of resist polymers. VI. Copolymers of trihalophenylmethacrylate and methyl methacrylate
- 1 May 1985
- journal article
- research article
- Published by Wiley in Journal of Polymer Science: Polymer Chemistry Edition
- Vol. 23 (5) , 1421-1432
- https://doi.org/10.1002/pol.1985.170230515