Preparation of Large Area Cross-Sectional Tem Specimen of Semiconducting Heteroepitaxial Materials

Publisher Website

1 January 1991

journal article
Published by Springer Nature in MRS Proceedings

Vol. 254
https://doi.org/10.1557/proc-254-201

Abstract

No abstract available

Keywords

This publication has 5 references indexed in Scilit:

Chemically Assisted Ion Beam Etching (CAIBE)- a New Technique for TEM Specimen Preparation of Materials
MRS Proceedings, 1990
A Rapid Specimen Preparation Technique For Cross-Section Tem Investigation Of Semiconductors and Metals
MRS Proceedings, 1987
Ion Milling of Compound Semiconductors for Transmission Electron Microscopy
MRS Proceedings, 1987
Cross-Sectioning Specific Devices and Regions in I.C. Wafers
MRS Proceedings, 1987
A new type of source generating misfit dislocations
Applied Physics B Laser and Optics, 1978