Preferentially Oriented Cubic Boron Nitride Films Grown on Si (001) Substrates by Ion Assisted Pulsed Laser Deposition
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Ion-assisted pulsed laser deposition of cubic BN films on Si (001) substratesJournal of Materials Research, 1992
- New developments in the growth of epitaxial cubic boron nitride and diamond films on siliconDiamond and Related Materials, 1992
- Growth and characterization of epitaxial cubic boron nitride films on siliconPhysical Review B, 1991
- Characterizations of Pulsed Laser Deposited Boron Nitride FilmsPublished by Elsevier ,1991
- Formation of dielectric and semiconductor thin films by laser-assisted evaporationApplied Physics A, 1988