Preparation and Electrical Properties of an Anodic Oxide of InP

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Abstract
Electrical properties of an anodic oxide of grown in tartaric acid/propylene glycol electrolytes with pH of 2–12 have been studied. The oxide composition is varied from to , depending on the pH of the electrolyte employed A subsequent annealing is necessary to dehydrate grown oxides. Annealing at a temperature higher than 300°C degrades the electrical properties of the interface, and interface instability due to the annealing increases with increasing content in the oxide. The oxide grown in the pH 5–7 electrolyte at 1–2 mA/cm2 current density and then annealed at 200°C has an interface‐state density of ≲1012 cm−2 · eV−1 at and of near the midgap.

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