Ultrahigh vacuum lock
- 1 June 1976
- journal article
- letter
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 47 (6) , 772-773
- https://doi.org/10.1063/1.1134737
Abstract
An UHV lock is described that makes it possible to change samples, keeping the pressure in the UHV system at 10−9– 10−10 Torr. The samples are mounted on a sample holder that can be heated up to about 1000 DC.Keywords
This publication has 0 references indexed in Scilit: