Direct evidence for the amorphous silicon phase in visible photoluminescent porous silicon
- 3 August 1992
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 61 (5) , 563-565
- https://doi.org/10.1063/1.107837
Abstract
We report on micro‐Raman spectroscopy studies of porous silicon which show an amorphous silicon Raman line at 480 R cm−1 from regions that emit visible photoluminescence. A Raman line corresponding to microcrystalline silicon at 510 R cm−1 is also observed. X‐ray photoelectron spectroscopy data is presented which shows a high silicon‐dioxide content in porous silicon consistent with an amorphous silicon phase.Keywords
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