Surface temperature measurements during thin film deposition by r.f. sputtering
- 1 June 1975
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 27 (2) , L15-L17
- https://doi.org/10.1016/0040-6090(75)90046-2
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Temperature Rise during Film Deposition by rf and dc SputteringJournal of Vacuum Science and Technology, 1972
- Thin-film maximum thermometerThin Solid Films, 1969