Laser and pinch plasma x-ray sources for microscopy and lithography
- 1 February 1994
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
Abstract
Experimental results on radiative properties of laser produced and pinch plasmas are discussed in comparison and with respect to the specific sets of requirements defined by proximity printing x-ray lithography and full field imaging x-ray microscopy.Keywords
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