Effect of Defect Structure on the Optical Dispersion Properties of Thin Films of TiNx

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Abstract
Thin films of TiNx with controlled composition were prepared by means of reactive electronbeam evaporation. Their microspecular reflectance was measured as a function of both wavelength and deviation from stoichiometry. The correlation between the electrical and optical properties as suggested by Hagen-Rubens and Drude was demonstrated
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