A piezoceramic fine-movement control
- 1 March 1981
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 14 (3) , 295-296
- https://doi.org/10.1088/0022-3735/14/3/006
Abstract
A piezoelectric micropositioner is described which, by producing static linear displacements in the range from 13 mu m down to a few nm, takes over where mechanical methods become impracticable. A resolution of 1 nm should be achievable.Keywords
This publication has 2 references indexed in Scilit:
- A stable, high finesse scanning Fabry-Perot interferometer with piezoelectric transducersJournal of Physics E: Scientific Instruments, 1971
- Barium titanate ceramics for fine-movement controlJournal of Scientific Instruments, 1962