Design and control of a high precision electron beam machine
- 1 January 1967
- journal article
- Published by Institution of Engineering and Technology (IET) in Radio and Electronic Engineer
- Vol. 33 (2) , 83-96
- https://doi.org/10.1049/ree.1967.0014
Abstract
A two-lens electron beam machine is designed to give maximum power density in spot diameters ranging from 1.5 μm to 10 μm. The beam is deflected in a raster and modulated by a simple pattern generator. The design and performance of the electron optical system and the present control equipment are discussed together with a proposal for an on-line computer control systemKeywords
This publication has 1 reference indexed in Scilit:
- The Electron MicroscopePhysics Today, 1961