Organic and aqueous electrolytes used for etching macro- and mesoporous silicon

• 23 April 2003
• journal article
• research article
• Published by Wiley in Physica Status Solidi (a)
• Vol. 197  (1) , 34-38
• https://doi.org/10.1002/pssa.200306464

Abstract

Keywords

• 61.43.GT
• 81.16.PR
• 82.45.FK
• 85.85.+J