Method for measuring diffusion of moisture in polyimide
- 28 October 1991
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 59 (18) , 2278-2280
- https://doi.org/10.1063/1.106410
Abstract
A method of easily measuring the diffusion coefficient for the diffusion of moisture in polyimide is proposed. A polyimide film which is sandwiched between a silicon wafer and a metal film is exposed at the edge to moisture for various lengths of time. The progression of the diffusion process is delineated by placing the sample on a hot plate at about 350 °C. The pressure of the moisture causes the metal film to bubble. Diffusion coefficients are calculated for two different forms of polyimide.Keywords
This publication has 2 references indexed in Scilit:
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- Water permeation of polymer films. I. PolyimideJournal of Applied Polymer Science, 1979