Intra-Grain Defects - Limiting Factor for Low-Temperature Polycrystalline Silicon Films?
- 1 November 2001
- journal article
- Published by Trans Tech Publications, Ltd. in Solid State Phenomena
- Vol. 80-81, 95-100
- https://doi.org/10.4028/www.scientific.net/ssp.80-81.95
Abstract
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