Anodic Oxidation of GaAs Using Oxygen Plasma

• 1 January 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (S1) , 321
• https://doi.org/10.7567/jjaps.17s1.321

Abstract

Keywords

• ANODIC OXIDATION
• USING OXYGEN
• GAAS USING
• OXYGEN PLASMA
• OXIDATION OF GAAS