Polysilicon X-ray masks
- 31 May 1989
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 9 (1-4) , 159-161
- https://doi.org/10.1016/0167-9317(89)90037-3
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Fine-grained polysilicon films with built-in tensile strainIEEE Transactions on Electron Devices, 1988
- A simple technique for the determination of mechanical strain in thin films with applications to polysiliconJournal of Applied Physics, 1985