Dislocations and interfaces in semiconductor heterostructures

• 1 April 1989
• journal article
• semiconductor processing
• Published by Springer Nature in JOM
• Vol. 41  (4) , 10-15
• https://doi.org/10.1007/bf03220191

Abstract

Keywords

• GAAS
• BURGER VECTOR
• RAPID THERMAL ANNEALING
• CRITICAL THICKNESS
• MISFIT DISLOCATION