Rate constants for the etching of gallium arsenide by molecular iodine

• 1 March 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (2) , 668-674
• https://doi.org/10.1116/1.586430

Abstract

Keywords

• GALLIUM ARSENIDE
• RATE CONSTANT