Silicon Microactuators for Computer Disk Drives
- 1 January 1996
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 35 (1S) , 350
- https://doi.org/10.1143/jjap.35.350
Abstract
Silicon micromachining will be an important manufacturing technology for future-generation, high-performance optical and magnetic storage products. In this paper, we shall present recent results related to the design and fabrication of silicon micromachined electromagnetic piggyback microactuators for significantly increasing the track density of magnetic (and potentially optical) rigid disk drives.Keywords
This publication has 2 references indexed in Scilit:
- Silicon micromachined SCALED technologyIEEE Transactions on Industrial Electronics, 1995
- Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drivesJournal of Microelectromechanical Systems, 1995