Thinning crystals of semiconducting compounds for transmission electron microscopy
- 1 June 1966
- journal article
- Published by IOP Publishing in Journal of Scientific Instruments
- Vol. 43 (6) , 371-373
- https://doi.org/10.1088/0950-7671/43/6/305
Abstract
Chemical thinning methods have been developed for CdS, GaAs, GaAsxP1-x, GaP, InSb and ZnS. Details of the techniques are given and some general features of the defects seen in the electron microscope are outlined.Keywords
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