Tunable, membrane-based, pneumatic micro-mirrors
- 11 October 2006
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A design methodology for a bulk-micromachined two-dimensional electrostatic torsion micromirrorJournal of Microelectromechanical Systems, 2003
- Endoscopic optical coherence tomography with new MEMS mirrorElectronics Letters, 2003
- Micromachined electromagnetic scanning mirrorsOptical Engineering, 1997