Formation Process of Tantalum Nitride by the Reaction of Tantalum Pentachloride with Ammonia in the Vapor Phase and Properties of the Tantalum Nitride Formed
Open Access
- 5 August 1983
- journal article
- Published by The Electrochemical Society of Japan in Denki Kagaku oyobi Kogyo Butsuri Kagaku
- Vol. 51 (8) , 676-680
- https://doi.org/10.5796/kogyobutsurikagaku.51.676
Abstract
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